BROWSE

Related Researcher

Author

Kim, Taesung
Microfluidics & Nanomechatronics Lab (μFNM)
Research Interests
  • Micro-/Nanofluidics

ITEM VIEW & DOWNLOAD

Fabricating a multi-level barrier-integrated microfluidic device using grey-scale photolithography

Cited 2 times inthomson ciCited 2 times inthomson ci
Title
Fabricating a multi-level barrier-integrated microfluidic device using grey-scale photolithography
Author
Nam, YoonkwangKim, MinseokKim, Taesung
Keywords
SINGLE-EXPOSURE PHOTOLITHOGRAPHY; GRAYSCALE MASKS; SYSTEM
Issue Date
201310
Publisher
IOP PUBLISHING LTD
Citation
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.23, no.10, pp.1 - 7
Abstract
Most polymer-replica-based microfluidic devices are mainly fabricated by using standard soft-lithography technology so that multi-level masters (MLMs) require multiple spin-coatings, mask alignments, exposures, developments, and bakings. In this paper, we describe a simple method for fabricating MLMs for planar microfluidic channels with multi-level barriers (MLBs). A single photomask is necessary for standard photolithography technology to create a polydimethylsiloxane grey-scale photomask (PGSP), which adjusts the total amount of UV absorption in a negative-tone photoresist via a wide range of dye concentrations. Since the PGSP in turn adjusts the degree of cross-linking of the photoresist, this method enables the fabrication of MLMs for an MLB-integrated microfluidic device. Since the PGSP-based soft-lithography technology provides a simple but powerful fabrication method for MLBs in a microfluidic device, we believe that the fabrication method can be widely used for micro total analysis systems that benefit from MLBs. We demonstrate an MLB-integrated microfluidic device that can separate microparticles.
URI
Go to Link
DOI
http://dx.doi.org/10.1088/0960-1317/23/10/105015
ISSN
0960-1317
Appears in Collections:
MNE_Journal Papers

find_unist can give you direct access to the published full text of this article. (UNISTARs only)

Show full item record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

MENU