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- Lee, Zonghoon
- Atomic-Scale Electron Microscopy Lab.
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TEM Analyses of Plasma Enhanced Atomic Layer Deposition
- Author(s)
- Lee, Zonghoon, Kim, Kangsik
- Issued Date
- 2015-10-28
- Citation
- 14th international union of materials research societies international conference on advanced materials
- Publisher
- International Union of Materials Research Societies
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