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- Kim, Taesung
- Microfluidics & Nanomechatronics Lab.
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Geometrical evaluation of crack-lithography assisted nanopatterns on SU-8 film by annealing conditions
- Alternative Title
- 크랙-포토리소그래피를 이용하여 SU-8 필름에 형성된 나노패턴의 열처리 조건에 따른 구조 변화
- Issued Date
- 2016-04-08
- Citation
- 제18회 KMEMS 학술대회
- Publisher
- 마이크로나노시스템학회
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