Macroscopic 10-Terabit-per-Square- Inch Arrays from Block Copolymers with Lateral Order
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- Macroscopic 10-Terabit-per-Square- Inch Arrays from Block Copolymers with Lateral Order
- Park, Soojin; Lee, Dong Hyun; Xu, Ji; Kim, Bokyung; Hong, Sung Woo; Jeong, Unyong; Xu, Ting; Russell, Thomas P.
- THIN-FILMS; BOTTOM-UP; LITHOGRAPHY; GRAPHOEPITAXY; TEMPLATES; SURFACES; ROUTE
- Issue Date
- AMER ASSOC ADVANCEMENT SCIENCE
- SCIENCE, v.323, no.5917, pp.1030 - 1033
- Generating laterally ordered, ultradense, macroscopic arrays of nanoscopic elements will revolutionize the microelectronic and storage industries. We used faceted surfaces of commercially available sapphire wafers to guide the self- assembly of block copolymer microdomains into oriented arrays with quasi- long- range crystalline order over arbitrarily large wafer surfaces. Ordered arrays of cylindrical microdomains 3 nanometers in diameter, with areal densities in excess of 10 terabits per square inch, were produced. The sawtoothed substrate topography provides directional guidance to the self- assembly of the block copolymer, which is tolerant of surface defects, such as dislocations. The lateral ordering and lattice orientation of the single- grain arrays of microdomains are maintained over the entire surface. The approach described is parallel, applicable to different substrates and block copolymers, and opens a versatile route toward ultrahigh- density systems.
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