Simulation of Laser-Directed Self-Assembly of Block Copolymer Nanostructures

Abstract

Block copolymer self-assembly has received much attention as a complementary strategy for conventional photolithography. However, polygrain structures with many defects are spontaneously formed during the self-assembly, and controlling long-range order has been a long-standing challenge for its practical applications. Several research groups recently reported well-aligned self-assembly of block copolymers using laser zone annealing process. Using quasi-static simulation adopting self-consistent field theory method, we model laser writing directed self-assembly of surface-perpendicular lamellae as well as surface-parallel cylinders. Miniaturized simulations of experimental systems confirm a strong tendency for lamellar domains to grow in the direction of laser scanning. Cylindrical self-assembled domains exhibit similar behaviors provided that the surface prefers one block and the block copolymer film thickness is moderate.