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- Chung, Il-Sug
- Nano-Optoelectronics Lab.
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Improvement of fabrication method of resonant cavity enhanced photodiodes for bi-directional optical interconnects
- Author(s)
- Chung, Il-Sug, Lee, Yong Tak, Kim, Jae-Eun, Park, Hae Yong
- Issued Date
- 2004-07-26
- Citation
- PHYSICS OF SEMICONDUCTORS: 27th International Conference on the Physics of Semiconductors, ICPS-27, v.772, pp.1559 - 1560
- Abstract
- Reflectivity of a quarter wave mirror (QWM) can be controlled by choosing the outermost layer of the QWM appropriately. For a GaAs/Al 0.75Ga0.25As QWM, depositing a TiO2 layer as the incoming outermost layer decreases the reflectivity to the same degree as removing 18.5 layers. Therefore, an efficient method to fabricate resonant cavity enhanced photodiodes for bi-directional optical interconnects is proposed. This method needs no etching process for quantum efficiency tuning, while giving a quantum efficiency of approximately 90% using currently available deposition technique.
- Publisher
- PHYSICS OF SEMICONDUCTORS: 27th International Conference on the Physics of Semiconductors, ICPS-27
- ISBN
- 978-073540257-7
- ISSN
- 0094-243X
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