2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, pp.878 - 881
Abstract
This paper presents novel electrochemical sensing platforms consisting of a set of a suspended carbon nanowire mesh electrode of deliberately controlled shape (hexagonal or diamond) and a planar carbon electrode located just below the suspended electrode that achieved the electrochemical current signal amplification of 120 times in a micro-channel by redox cycling of redox species. The carbon sensing platform was fabricated using only series of photolithography and pyrolysis processes which are known as Carbon-MEMS processes enabling production of carbon nano-structures in designed manner without using expensive nanolithography tools. The functionality of the stacked carbon nanoelectrodes were studied using cyclic voltammetry.
Publisher
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012