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- Shin, Heungjoo
- Micro/Nano Integrated Systems Lab.
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Development of a hydrogen gas sensor based on a suspended monolithic carbon nanowire platform
- Author(s)
- Heo, Jeongil, Lim, Yeongjin, Shin, Heungjoo
- Issued Date
- 2013-06-16
- Citation
- 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, pp.2079 - 2081
- Abstract
- We introduce a hydrogen gas sensor based on a suspended monolithic carbon nanowire structure. This structure provides selective and sensitive hydrogen sensing capability and unique advantages overcoming limitation of on-plane nanostructure based sensors. The fabrication of suspended carbon nanowire consists of simple two-step conventional microfabrication processes; photolithography and pyrolysis. The monolithic structure ensures perfect ohmic contact between the nanowire and the electrical contact pads. 20 ppm of hydrogen was successfully detected by a suspended monolithic carbon nanowire (width 300 nm, thickness 600 nm, distance between the nanowire and the substrate 7.3 μm) coated wiht a 10-nm-thick palladium layer.
- Publisher
- 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
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