Development of suspended 2D carbon nanostructures: Nanowires to nanomeshes

Abstract

We report on the development of monolithic suspended glassy carbon nanostructures inclusive of nanowires and nanomeshes fabricated using only two simple batch processes consisting of UV lithography and the polymer pyrolysis. Owing to the volume shrinkage during pyrolysis process, the micros-sized photoresist structures are converted to the nanoscale glassy carbon structures. The suspended glassy carbon structures can be patterned in various geometries such as mesh depending on the photomask patterns. The suspended glassy carbon nanostructures show good electrical and electrochemical behaviors, and perfect ohmic contact due to monolithic structure. The feasibility of the suspended glassy carbon nanostructures for sensing platforms was confirmed by electrochemical current characterization.