Development of the batch fabrication technique using carbon-MEMS for mixed-scale channel networks including tapered 3D microfunnels

Abstract

This paper reports a novel fabrication technique of a monolithic carbon mold for producing a mixedscale PDMS channel network consisting of nano- and microchannels. Nanofluidic has attracted much attention because of their distinguishing properties. A mixed-scale carbon mold was simply fabricated using a carbon-MEMS process. A soft lithography was used to complete mixed-scale channel networks. Because of anisotropic volume reduction in pyrolysis, vertical polymer side walls were converted into smoothly tapered carbon side walls. Therefore, 3D carbon microfunnel naturally can be converted from triangular prism polymer structure. PDMS microfunnel can guide fluid and particle to entrance of nanochannel more efficiently.