Fabrication of mixed-scale PMMA channel networks by nanoimprint using a convex carbon mold

Abstract

We introduce a simple fabrication method of mixed-scale PMMA (polymethyl methacrylate) channel networks via one step thermal nanoimprint using a monolithic convex carbon mold. Because this carbon mold consists of micro- and nanoscale convex structures, mixed-scale channel networks can be inscribed on the PMMA sheet by a single thermal nanoimprint process. After oxygen plasma treatment assisted thermal bonding, collapse/leakage-free fluidic device is completed.