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- Baik, Jeong Min
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Gas sensor based on a metal oxide nanowire forest built on a suspended carbon nano-heater
- Author(s)
- Lim, Yeongjin, Lee, Seungwook, Kwon, Yeong Min, Baik, Jeong Min, Shin, Heungjoo
- Issued Date
- 2018-01-23
- Citation
- 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, pp.905 - 907
- Abstract
-
This paper reports a novel metal oxide nanowire (MOx NW) based gas senor built on a suspended carbon nanowire heater allowing ultra-low power consumption. This sensing platform was fabricated using only wafer level batch fabrication processes such as carbon-MEMS, atomic layer deposition, and hydrothermal growth processes. In addition, the suspended high-aspect-ratio geometry of the carbon
nanowire enables MOx NWs to be heated with ultra-low power Joule heating.
- Publisher
- 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
- ISSN
- 1084-6999
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