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Ki, Hyungson
Laser Processing and Artificial Intelligence Lab.
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Pulsed laser deposition of functionally gradient diamond-like carbon (DLC) films using a 355 nm picosecond laser

Author(s)
Cho, HongraeKim, SanseoKi, Hyungson
Issued Date
2012-10
DOI
10.1016/j.actamat.2012.06.048
URI
https://scholarworks.unist.ac.kr/handle/201301/3301
Fulltext
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84866736497
Citation
ACTA MATERIALIA, v.60, no.18, pp.6237 - 6246
Abstract
In this study, functionally gradient diamond-like carbon (FGDLC) films are fabricated using a novel pulsed laser deposition technique to enhance adhesion strength. A 355 nm picosecond laser beam is split into two beams, and the power of each split beam is changed individually by a motorized beam attenuator as a function of time. In this way, two laser beams with customized time-varying powers are available for ablating two different target materials. Two beams are irradiated on graphite and 316L stainless steel targets, respectively, in a vacuum chamber, and the produced dissimilar plasmas are mixed in space before they are deposited on a stainless steel 316L substrate. Using this method, we have built FGDLC films with a thickness of similar to 510 nm, where the composition changes gradually from stainless steel to DLC in the direction of deposition. We have confirmed that FGDLC films show much higher adhesion strength than normal DLC films.
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
ISSN
1359-6454
Keyword (Author)
Functionally gradient filmPulsed laser depositionDiamond-like carbon (DLC)Picosecond laserAdhesion strength
Keyword
AMORPHOUS-CARBONTHIN-FILMSABLATION

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