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김태성

Kim, Taesung
Microfluidics & Nanomechatronics Lab.
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dc.citation.endPage 6 -
dc.citation.number 27 -
dc.citation.startPage 1 -
dc.citation.title NANOTECHNOLOGY -
dc.citation.volume 22 -
dc.contributor.author Lee, Jung-Pil -
dc.contributor.author Bang, Byoung Man -
dc.contributor.author Choi, Sinho -
dc.contributor.author Kim, Taesung -
dc.contributor.author Park, Soojin -
dc.date.accessioned 2023-12-22T06:08:03Z -
dc.date.available 2023-12-22T06:08:03Z -
dc.date.created 2013-06-11 -
dc.date.issued 2011-07 -
dc.description.abstract We demonstrate a facile fabrication of a rich variety of silicon patterns with different length scales by combining polymer lithography and a metal-assisted chemical etching method. Several types of polymer patterns were fabricated on silicon substrates, and silver layers were deposited on the patterned silicon surfaces and used to etch the silicon beneath. Various silicon patterns including topographic lines, concentric rings, and square arrays were created at a micro-and nanoscale after etching the silicon and subsequent removal of the patterned polymer masks. Alternatively, the arrays of sub-30 nm silicon nanowires were produced by a chemical etching of the silicon wafer which was covered with highly ordered polystyrene-block-polyvinylpyridine (PS-b-PVP) micellar films. In addition, silicon nanohole arrays were also generated by etching with hexagonally packed silver nanoparticles that were prepared using PS-b-PVP block copolymer templates. -
dc.identifier.bibliographicCitation NANOTECHNOLOGY, v.22, no.27, pp.1 - 6 -
dc.identifier.doi 10.1088/0957-4484/22/27/275305 -
dc.identifier.issn 0957-4484 -
dc.identifier.scopusid 2-s2.0-79957862630 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/3127 -
dc.identifier.url http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84867364806 -
dc.identifier.wosid 000291021200013 -
dc.language 영어 -
dc.publisher IOP PUBLISHING LTD -
dc.title Patterning of various silicon structures via polymer lithography and catalytic chemical etching -
dc.type Article -
dc.relation.journalWebOfScienceCategory Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied -
dc.relation.journalResearchArea Science & Technology - Other Topics; Materials Science; Physics -
dc.description.journalRegisteredClass scie -
dc.description.journalRegisteredClass scopus -

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