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Author

Park, Soojin
Nano-Functional Materials Lab
Research Interests
  • Block Copolymers, nanostructured materials for Lithium-Ion batteries, wearable and stretchable energy storage applications

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Patterning of various silicon structures via polymer lithography and catalytic chemical etching

Cited 5 times inthomson ciCited 5 times inthomson ci
Title
Patterning of various silicon structures via polymer lithography and catalytic chemical etching
Author
Lee, Jung-PilBang, Byoung ManChoi, SinhoKim, TaesungPark, Soojin
Keywords
Copper pattern; Current collector; Electrochemical performance; High rate capability; Immersion process; Lithium-ion battery; Mechanically robust; Nano-structured; Reversible capacity; Silicon nanoparticles
Issue Date
201107
Publisher
IOP PUBLISHING LTD
Citation
NANOTECHNOLOGY, v.22, no.27, pp.1 - 6
Abstract
We demonstrate a facile fabrication of a rich variety of silicon patterns with different length scales by combining polymer lithography and a metal-assisted chemical etching method. Several types of polymer patterns were fabricated on silicon substrates, and silver layers were deposited on the patterned silicon surfaces and used to etch the silicon beneath. Various silicon patterns including topographic lines, concentric rings, and square arrays were created at a micro-and nanoscale after etching the silicon and subsequent removal of the patterned polymer masks. Alternatively, the arrays of sub-30 nm silicon nanowires were produced by a chemical etching of the silicon wafer which was covered with highly ordered polystyrene-block-polyvinylpyridine (PS-b-PVP) micellar films. In addition, silicon nanohole arrays were also generated by etching with hexagonally packed silver nanoparticles that were prepared using PS-b-PVP block copolymer templates.
URI
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DOI
http://dx.doi.org/10.1088/0957-4484/22/27/275305
ISSN
0957-4484
Appears in Collections:
MNE_Journal Papers
ECHE_Journal Papers

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