Investigation of 90 degrees submicrometer radius bends of metal-insulator-silicon-insulator-metal waveguides

Abstract

We theoretically and experimentally investigate 90 degrees submicrometer radius bends (SRB) of metal-insulator-silicon-insulator- metal (MISIM) waveguides that are plasmonic waveguides fabricated with standard CMOS technology. We focus on the bends of MISIM waveguides with a wide (e. g., 160-220 nm) silicon line. This study shows that the bend efficiently turns the direction of the MISIM waveguide by 90 degrees if its radius is about 0.7 mu m. Moreover, we discuss the fact that the bend may be superior to a SRB of a silicon photonic waveguide when it is used to implement a ring resonator with a high quality factor and small volume.