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Ki, Hyungson
Laser Processing & Multiphysics Systems Laboratory
Research Interests
  • Laser materials processing

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Fabricating functionally graded films with designed gradient profiles using pulsed laser deposition

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Title
Fabricating functionally graded films with designed gradient profiles using pulsed laser deposition
Author
Won, Yoo JaiKi, Hyungson
Keywords
Chemical compositions; Coatings and films; Deposition profiles; Energy dispersive X ray spectroscopy; Functionally graded; Material combination; Pulsed-laser deposition technique; Thickness of the film
Issue Date
201305
Publisher
AMER INST PHYSICS
Citation
JOURNAL OF APPLIED PHYSICS, v.113, no.17, pp.174910 -
Abstract
A novel picosecond-laser pulsed laser deposition method has been developed for fabricating functionally graded films with pre-designed gradient profiles. Theoretically, the developed method is capable of precisely fabricating films with any thicknesses and any gradient profiles by controlling the laser beam powers for the two different targets based on the film composition profiles. As an implementation example, we have successfully constructed functionally graded diamond-like carbon films with six different gradient profiles: linear, quadratic, cubic, square root, cubic root, and sinusoidal. Energy dispersive X-ray spectroscopy is employed for investigating the chemical composition along the thickness of the film, and the deposition profile and thickness errors are found to be less than 3% and 1.04%, respectively. To the best of the authors' knowledge, this is the first method for fabricating films with designed gradient profiles and has huge potential in many areas of coatings and films, including multifunctional optical films. We believe that this method is not only limited to the example considered in this study, but also can be applied to all material combinations as long as they can be deposited using the pulsed laser deposition technique.
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DOI
http://dx.doi.org/10.1063/1.4803692
ISSN
0021-8979
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MNE_Journal Papers
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