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Jang, Jaesung
Sensors & Aerosols Lab
Research Interests
  • Bio-MEMS

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Simultaneous determination of position and mass in the cantilever sensor using transfer function method

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Title
Simultaneous determination of position and mass in the cantilever sensor using transfer function method
Author
Kim, DeokmanHong, SeongkyeolJang, JaesungPark, Junhong
Keywords
Cantilever sensors; Cantilever vibrations; Laser Doppler vibrometers; Lead zirconate titanate; Micro-cantilevers; Simultaneous determinations; Simultaneous measurement; Transfer function method
Issue Date
201307
Publisher
AMER INST PHYSICS
Citation
APPLIED PHYSICS LETTERS, v.103, no.3, pp.1 - 4
Abstract
We present the simultaneous measurement of mass and position of micro-beads attached to the cantilever-based mass sensors using the transfer function method. 10 μm diameter micro-beads were placed on micro-cantilevers and the cantilevers were excited by lead-zirconate-titanate through low-pass filtered random voltages. The cantilever vibration was measured via a laser Doppler vibrometer before and after applying the beads. From the measured transfer function, the bead position was identified using its influence on the cantilever kinetic energy. The bead mass was then obtained by analyzing the wave propagation near the beads. The predicted position and mass agreed well with actual values.
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DOI
http://dx.doi.org/10.1063/1.4813839
ISSN
0003-6951
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MNE_Journal Papers
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