dc.citation.endPage |
S79 |
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dc.citation.startPage |
S76 |
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dc.citation.title |
CURRENT APPLIED PHYSICS |
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dc.citation.volume |
12 |
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dc.contributor.author |
Hwang, Younghun |
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dc.contributor.author |
Kim, Hyungmin |
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dc.contributor.author |
Um, Youngho |
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dc.date.accessioned |
2023-12-22T04:36:32Z |
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dc.date.available |
2023-12-22T04:36:32Z |
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dc.date.created |
2017-02-23 |
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dc.date.issued |
2012-12 |
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dc.description.abstract |
We have investigated the effects of nitrogen annealing on the structural, electrical, and optical properties of Al-doped ZnO (ZnO:Al) thin films deposited by RF magnetron sputtering at room temperature. From the X-ray diffraction observations, films have highly crystalline structure with a c-axis preferred orientation. The most improvements in the electrical and optical properties of the ZnO:Al films were obtained by nitrogen annealing. The ZnO:Al films exhibited an average optical transmittance of 90-95% in the visible range and a sharp fundamental absorption edge. Spectroscopic ellipsometry (SE) was used to extract the optical constants of thin films. The optical characteristics of ZnO:Al films were modeled using a Tauc-Lorentz based dielectric function. The bandgap energy increased with the increases in nitrogen annealing temperature, which change in accordance with the Burstein-Moss effect, and was consistent with the observed changes in the transport properties. |
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dc.identifier.bibliographicCitation |
CURRENT APPLIED PHYSICS, v.12, pp.S76 - S79 |
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dc.identifier.doi |
10.1016/j.cap.2012.05.021 |
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dc.identifier.issn |
1567-1739 |
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dc.identifier.scopusid |
2-s2.0-84871926207 |
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dc.identifier.uri |
https://scholarworks.unist.ac.kr/handle/201301/21418 |
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dc.identifier.url |
http://www.sciencedirect.com/science/article/pii/S1567173912002064 |
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dc.identifier.wosid |
000316215400017 |
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dc.language |
영어 |
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dc.publisher |
ELSEVIER SCIENCE BV |
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dc.title |
Structural, electrical, and ellipsometric properties of nitrogen-annealed ZnO:Al films |
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dc.type |
Article |
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dc.description.journalRegisteredClass |
scie |
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dc.description.journalRegisteredClass |
scopus |
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