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Author

Choi, EunMi
THz Vacuum Electronics and Electrodynamics
Research Interests
  • High power millimeter-wave/THz wave, vacuum electronics, plasma breakdown, electron beams, electromagnetics, microwave/RF engineering

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Nano-CNC machining of sub-THz vacuum electron devices

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Title
Nano-CNC machining of sub-THz vacuum electron devices
Author
Gamzina, DianaHimes, Logan G.Barchfeld, RobertZheng, YuanPopovic, Branko K.Paoloni, ClaudioChoi, EunMiLuhmann, Neville C.
Keywords
vacuum electron device (VED); High frequency; micromachining; nano-computer numerical control (CNC); terahertz
Issue Date
201610
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Citation
IEEE TRANSACTIONS ON ELECTRON DEVICES, v.63, no.10, pp.4067 - 4073
Abstract
Nano-computer numerical control (CNC) machining technology is employed for the fabrication of sub-THz (100–1000 GHz) vacuum electron devices. Submicron feature tolerances and placement accuracy have been achieved and surface roughness of a few tens of nanometers has been demonstrated providing high-quality radio frequency (RF) transmission and reflection parameters on the tested circuit structures. Details of the manufacturing approach are reported for the following devices: W-band sheet beam (SB) klystron, two designs of a 220-GHz SB double-staggered grating traveling wave tube (TWT), 263-GHz SB TWT amplifier for an electron paramagnetic resonance spectrometer, 346-GHz SB backward wave oscillator for fusion plasma diagnostics, 346-GHz pencil beam backward wave oscillator, and 270-GHz pencil beam folded waveguide TWT self-driving amplifier. Application of the nano-CNC machining to nanocomposite scandate tungsten cathodes as well as to passive RF components is also discussed.
URI
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DOI
http://dx.doi.org/10.1109/TED.2016.2594027
ISSN
0018-9383
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