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dc.citation.endPage 22 -
dc.citation.number 1 -
dc.citation.startPage 15 -
dc.citation.title 센서학회지 -
dc.citation.volume 5 -
dc.contributor.author Park, Lee Soon -
dc.contributor.author Hur, Young Jun -
dc.contributor.author Sohn, Byung Ki -
dc.date.accessioned 2023-12-22T12:39:34Z -
dc.date.available 2023-12-22T12:39:34Z -
dc.date.created 2015-09-23 -
dc.date.issued 1996-05 -
dc.description.abstract FET type Ca^(2+)sensor(Ca-ISFET) was fabricated by micropool and photolithographic method utilizing photosensitive polymer as membrane materials. When OMR-83 negative photoresist was used as membrane material, it gave good sensitivity by micropool method with dioctyladipate as plasticizer but it could not be used in the photolithographic method. When poly(vinyl butyral), PVB was used as membrane material, it gave relatively high sensitivity (23±0.2 mV/decade) for Ca^(2+) concentration range of 10^(-4)∼10^(-1) mole/ℓ by photolithographic method. PVB also provided good adhesion to the pH-ISFET base device without adhesion promoter pretreatment and any plasticizer. -
dc.identifier.bibliographicCitation 센서학회지, v.5, no.1, pp.15 - 22 -
dc.identifier.issn 1225-5475 -
dc.identifier.uri https://scholarworks.unist.ac.kr/handle/201301/17280 -
dc.identifier.url http://kiss.kstudy.com/journal/thesis_name.asp?tname=kiss2002&key=225187 -
dc.language 한국어 -
dc.publisher 한국센서학회 -
dc.title Photolithography에 의한 FET 형 Ca2+ 센서의 제작 및 특성 -
dc.type Article -
dc.description.journalRegisteredClass kci -

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